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Preset Fault Detection Package for AKT PECVD Tools
The Applied E3 Fault Detection for AKT PECVD package is specifically designed for the challenging tool integration, monitoring, utilization and scrap issues display manufacturers have today. Applied solves this by providing a fault detection package specifically configured and tuned for AKT PECVD tools that reduces scrap by acting on hard-to-find leaks before running product.
Package includes:
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Fault detection software and hardware: preconfigured and tested |
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Tool integration and sensor data collection plans "out-of-the-box" and ready to run on Day One |
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Best Known Methods for detecting hard-to-find pressure and atmospheric leaks - triggers action based on preset fault conditions |
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Training and Support |
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With Applied E3 Fault Detection, customers get:
Better results faster
Fastest implementation with preconfigured AKT PECVD tool integration.
Higher tool utilization
Reduce number of faults by knowing what sensors to monitor from the start.
Reduce scrap
Triggers immediate action or automatic intervention. Detects issues before they become a problem. |
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